Planned 1700sqft Cleanroom (2020)
1700sqft Planned Cleanroom
Available Fabrication Facilities:
FEI QUANTA 600FEG
- Electron Beam Lithography
- Build nanoscale devices with precision
- NPGS – Nanometer Patterning Generating System
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Consistent line widths below 20 nm
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Metal sputtering of platinum, gold, titanium, tantalum, nickel, chromium
- Ultra-vacuum operation
SCP P-6000 Spin Coater
- Can handle up to 6” wafers
- Programmable and can ramp up to 10000 rpm
Probe Station and 8 probers for device and circuit measurement
- IV, CV, IV(Temperature Controlled)
- Hall effect and Magnetoresistance measurements